Nonvolatile memory devices including oxygen-deficient metal oxide layers and methods of manufacturing the same

A method of manufacturing a nonvolatile memory device, comprising:

• preparing at least one switching device;
• and
• forming a storage node, the forming a storage node including
• forming a lower electrode electrically connected to the at least one switching device,
• forming one or more oxygen-deficient metal oxide layers such that at least one of the one or more metal oxide layers includes one or more of ITO, IZO, RuO2, ZnO, and ZrO, and at least one of the one or more metal oxide layers is electrically connected to the lower electrode,
• forming one or more data storage layers such that at least one of the one or more data storage layers includes one or more of Al2O3, CoO, Nb2O5, NiO, TiO2, V2O5, WO3, and ZnO, at least one of the one or more data storage layers is electrically connected to at least one of the one or more metal oxide layers, and a material of at least one of the metal oxide layers is different from a material of at least one of the data storage layers, and
• forming an upper electrode electrically connected to at least one of the one or more data storage layers,
• wherein the forming a storage node includes forming the storage node to absorb oxygen at one or more oxygen vacancies of the one or more metal oxide layers upon application of a voltage.