Method for bin-based control
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSunny Wu, Chih-Sheng Shih, Andy Tsen, Jo Fei Wang, Jong-I Mou, Hsin Kuan
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Abstract
A method for providing bin-based control when manufacturing integrated circuit devices is disclosed. The method comprises performing a plurality of processes on a plurality of wafer lots; determining a required bin quantity, an actual bin quantity, and a projected bin quantity; comparing the determined required bin quantity with the determined actual bin quantity and determined projected bin quantity; and modifying at least one of the plurality of processes on the plurality of wafer lots if the determined actual bin quantity and determined projected bin quantity fail to satisfy the determined required bin quantity.
Claims21
A method for providing bin-based control when manufacturing integrated circuit devices, wherein a bin is associated with one or more characteristics exhibited by an integrated circuit device, the method comprising:
- performing a plurality of processes on a plurality of wafer lots;
- determining a required bin quantity, an actual bin quantity, and a projected bin quantity;
- comparing the determined required bin quantity with the determined actual bin quantity and determined projected bin quantity;
- and
- modifying at least one of the plurality of processes on the plurality of wafer lots if the determined actual bin quantity and determined projected bin quantity fail to satisfy the determined required bin quantity.
A method for fabricating integrated circuit devices, the method comprising:
- determining a required bin quantity including a required delivery date and a deliverable bin quantity;
- calculating a bin quantity per processing lot if a first gap exists between the deliverable bin quantity and the required bin quantity;
- designating at least one of the processing lots for ship-out to fill the first gap;
- determining a required cycle time for the designated processing lot;
- and
- modifying a processing parameter of the designated processing lot if the required cycle time does not meet the required delivery date.
A system for providing bin-based control in a semiconductor manufacturing environment in which a plurality of processes are performed on a plurality of wafer lots, the system comprising:
- a virtual fabrication system coupled to a network;
- a manufacturing execution system (MES) coupled to the network, wherein the MES comprises a bin-based control module configured to:
- determine a required bin quantity, an actual bin quantity, and a projected bin quantity;
- compare the determined required bin quantity with the determined actual bin quantity and determined projected bin quantity;
- and
- modify at least one of the plurality of processes on the plurality of wafer lots if the determined actual bin quantity and determined projected bin quantity fail to satisfy the determined required bin quantity.
Dependencies are inferred from the claim text.