Orthogonal radio frequency voltage/current sensor with high dynamic range
AssigneeMKS Instruments, Inc.
InventorsTodd Heckleman, David J. Coumou, Yogendra K. Chawla
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Abstract
A radio frequency (RF) sensor that measures RF current includes a substrate that has an inner perimeter that defines an aperture. A conductor extends through the aperture. Sensor pads are arranged on the aperture and are connected to form two sensor loops. The loops generate an electrical signal that represents RF current flow through the center conductor. Additionally, a plurality of circular conductive rings may be included in the RF sensor to generate a signal representing the voltage of the conductor.
Claims28
A radio frequency (RF) sensor that measures RF current, comprising:
- a substrate including a first exterior layer, a second exterior layer, a first interior layer, a second interior layer and an inner perimeter that defines an aperture through the substrate;
- a first loop comprising a first plurality of sensor pads coupled to a first plurality of vias by a first plurality of traces, the first plurality of sensor pads being arranged on a wall of the aperture;
- and
- a second loop comprising a second plurality of sensor pads coupled to a second plurality of vias by a second plurality of traces, the second plurality of sensor pads being arranged on the wall of the aperture,
- wherein a center conductor for carrying RF current extends through the aperture and the first and second loops generate an electrical signal that represents RF current flow through the center conductor.
A radio frequency (RF) sensor that measures RF current, comprising:
- a substrate including an inner perimeter that defines an aperture through the substrate;
- a first loop comprising a first plurality of sensor pads coupled to a first plurality of vias by a first plurality of traces, the first plurality of sensor pads being arranged and spaced uniformly on a wall of the aperture;
- and
- a second loop comprising a second plurality of sensor pads coupled to a second plurality of vias by a second plurality of traces, the second plurality of sensor pads being arranged and spaced uniformly on the wall of the aperture,
- wherein a conductor for carrying RF current extends through the aperture and the first and second loops generate an electrical signal that represents RF current flow through the conductor.
A radio frequency (RF) sensor that measures RF current, comprising:
- a substrate including an inner perimeter that defines an aperture through the substrate;
- a first loop comprising a first plurality of sensor pads coupled to a first plurality of vias by a first plurality of traces, the first plurality of sensor pads being arranged on a wall of the aperture;
- and
- a second loop comprising a second plurality of sensor pads coupled to a second plurality of vias by a second plurality of traces, the second plurality of sensor pads extending along the inner perimeter,
- wherein a conductor for carrying RF current extends through the aperture and the first and second loops generate an electrical signal that represents RF current flow through the conductor.
Dependencies are inferred from the claim text.