Electronic pressure-sensing device
AssigneeLSI Corporation
InventorEdward B. Harris
Life of this patent
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Abstract
An electronic pressure-sensing device 100 comprising a transistor 105 located on a substrate 110. The device also comprises a linker arm 115 that has a tip 120 which is configured to touch a contact region 125 of the substrate that is near the transistor. The device also comprises a pressure converter 130 that is mechanically coupled to the linker arm. The pressure converter is configured to cause, in response to a pressure change, the tip to impart a force capable of changing an electrical conductivity of the transistor.
Claims20
An electronic pressure-sensing device, comprising:
- a transistor located on a substrate;
- a linker arm having a tip, said tip configured to touch a contact region of said substrate that is near said transistor;
- and
- a pressure converter mechanically coupled to said linker arm, said pressure converter configured to cause, in response to a pressure change, said tip to impart a force to change an electrical conductivity of said transistor.
A method of measuring pressure changes, comprising:
- moving a linker arm coupled to a pressure converter in response to said pressure converter being mechanically vibrated by a pressure change in a medium surrounding said pressure converter, wherein said movement causes a tip of said linker arm to impart a force a contact region of a substrate;
- applying a voltage across a transistor located on said substrate and near said contact region;
- and
- recording a first voltage or a first current from said transistor, said first voltage or said first current varying as a function of changes in said imparted force.
A method of manufacturing an electronic pressure-sensing device, comprising:
- forming a transistor on a substrate;
- situating a linker arm over said substrate such that a tip of said linker arm can touch a contact region of said substrate near said transistor;
- and
- coupling said linker arm to a pressure converter, said pressure converter configured to cause said tip to impart a force to said contact region in response to a pressure change in a medium surrounding said pressure converter.
Dependencies are inferred from the claim text.