Parametric amplification of a MEMS gyroscope by capacitance modulation

A Micro-Electro-Mechanical Systems (MEMS) sensor, comprising:

• a proof mass with at least one proof mass comb finger, the proof mass comb finger comprising:
• a proof mass comb finger end portion;
• and
• a proof mass comb finger attaching portion that couples the proof mass comb finger end portion to the proof mass;
• a sense electrode with at least one sense electrode comb finger separated from the proof mass comb finger by a gap, the gap defining a variable capacitive coupling between the proof mass comb finger and the sense electrode comb finger, the sense electrode comb finger comprising:
• a sense electrode comb finger end portion;
• and
• a sense electrode comb finger attaching portion that couples the sense electrode comb finger end portion to an anchor;
• an electrical output operable to output a time-varying electrical output, the time-varying electrical output being amplified by a variation of the variable capacitive coupling produced by an induced motor motion of the proof mass and the shape of the sense electrode, wherein the shape is such that the induced motor motion produces a variation in sense capacitance, whereby the variable output is amplified by the capacitance variation.

A sensor, comprising:

• a proof mass with at least one proof mass comb finger, the proof mass comb finger comprising:
• a proof mass comb finger end portion;
• and
• a proof mass comb finger attaching portion that couples the proof mass comb finger end portion to the proof mass;
• a sense electrode with at least one electrode comb finger separated from the proof mass comb finger by a gap, the gap defining a variable capacitive coupling between the proof mass comb finger and the electrode comb finger, the electrode comb finger comprising:
• an electrode comb finger end portion;
• and
• an electrode comb finger attaching portion that couples the electrode comb finger end portion to an anchor;
• an electrical output operable to output a variable output in response to a variation of the variable capacitive coupling produced by an induced motor motion of the proof mass and the shape of the sense electrode, wherein the shape is such that the induced motor motion produces a variation in sense capacitance, whereby the variable output is amplified by the capacitance variation.