Microelectromechanical gyroscope with open loop reading device and control method
AssigneeSTMicroelectronics S.r.l.
InventorsCarlo Caminada, Luciano Prandi, Ernesto Lasalandra
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AssigneeSTMicroelectronics S.r.l.
InventorsCarlo Caminada, Luciano Prandi, Ernesto Lasalandra
Estimating the term…
A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; and an open-loop reading device coupled to the inertial sensor for detecting displacements of the second mass according to the second axis. The driving device includes a read signal generator for supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency.
A microelectromechanical gyroscope, comprising:
A method for controlling a microelectromechanical gyroscope, comprising the steps of:
A system, comprising:
Dependencies are inferred from the claim text.