Scanning probe apparatus
AssigneeCanon Kabushiki Kaisha
InventorsTakao Kusaka, Nobuki Yoshimatsu, Susumu Yasuda, Junichi Seki
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Abstract
In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.
Claims4
A sample stage for holding a sample, comprising:
- a drive element for moving a sample holding table;
- and
- a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled,
- wherein said sample stage is detachably mountable, integrally with the sample holding table, the drive element, and the movable portion, to a main assembly of an apparatus.
Dependencies are inferred from the claim text.