Method of manufacturing micro structure, and method of manufacturing mold material
AssigneeSony Corporation
InventorsKoji Kadono, Yosuke Murakami
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Abstract
Disclosed herein are a method of producing microstructure and a method of producing mold, the methods permitting production of much smaller pores than before in an atmosphere where impurities are negligible and also permitting production of microstructures having a smaller size and a higher crystallinity than before with the help of the pores. The method of producing microstructure comprises a step of making pores (4) in a substrate (1) to become a mold (5) by irradiation with a focused energy beam (3) and a step of growing a microstructure (8) in the thus made pores (4). The method of producing a mold includes a step of making pores (4) by irradiating a substrate (1) to become a mold (5) with a focused energy beam (3).
Claims7
A method of producing microstructure which comprises a step of making pores in a substrate to become a mold by irradiation with a focused energy beam and a step of growing a microstructure in the thus made pores, wherein said microstructure is grown from a catalyst substance which has been attached to the bottom of the previously made pores,
- wherein said catalyst substance is precipitated at the bottom of the pores by irradiating the previously made pores with a focused energy beam in an atmosphere of a gas as a raw material of the catalyst,
- wherein the gas as a raw material of the catalyst is a metal gas of iron, nickel, cobalt, tungsten, molybdenum, gold, or the like.
A method of producing microstructure which comprises a step of making pores in a substrate to become a mold by irradiation with a focused energy beam and a step of growing a microstructure in the thus made pores, wherein said microstructure is grown from a catalyst substance which has been attached to the bottom of the previously made pores,
- wherein said catalyst substance is precipitated at the bottom of the pores by irradiating the previously made pores with a focused energy beam in an atmosphere of a gas as a raw material of the catalyst, wherein said catalyst substance is electrochemically precipitated at the bottom of the previously made pores.
A method of producing microstructure which comprises a step of making pores in a substrate to become a mold by irradiation with a focused energy beam and a step of growing a microstructure in the thus made pores, wherein said microstructure is grown from a catalyst substance which has been attached to the bottom of the previously made pores,
- wherein said catalyst substance is precipitated at the bottom of the pores by irradiating the previously made pores with a focused energy beam in an atmosphere of a gas as a raw material of the catalyst, wherein said microstructure is one which is grown one-dimensionally.
A method of producing microstructure which comprises a step of making pores in a substrate to become a mold by irradiation with a focused energy beam and a step of growing a microstructure in the thus made pores, wherein said microstructure is grown from a catalyst substance which has been attached to the bottom of the previously made pores,
- wherein said catalyst substance is precipitated at the bottom of the pores by irradiating the previously made pores with a focused energy beam in an atmosphere of a gas as a raw material of the catalyst, wherein said microstructure is obtained in such a form as to fill the pore.
A method of producing microstructure which comprises a step of making pores in a substrate to become a mold by irradiation with a focused energy beam and a step of growing a microstructure in the thus made pores, wherein said microstructure is grown from a catalyst substance which has been attached to the bottom of the previously made pores,
- wherein said catalyst substance is precipitated at the bottom of the pores by irradiating the previously made pores with a focused energy beam in an atmosphere of a gas as a raw material of the catalyst, wherein said microstructure is obtained in such a form as to fill the pore and then it is removed from the pore.
Dependencies are inferred from the claim text.