Polymer-based pattern mask system and method having enhanced adhesion

A method of patterning a substrate, the method comprising:

• applying a coating of an organosilane to a surface of a substrate to be patterned, the substrate surface comprising a material compatible with the organosilane;
• printing a pattern mask on the coated substrate surface using a roll-to-roll printing process, the pattern mask being polymer-based, the organosilane forming a bond between the pattern mask and the substrate surface;
• patterning the substrate surface using the pattern mask;
• and
• lifting-off the pattern mask from the patterned substrate surface, wherein the organosilane enhances adhesion between the substrate surface and the pattern mask during printing and patterning, and wherein lifting-off the pattern mask is unhindered by the organosilane.

A polymer-based pattern mask system comprising:

• a polymer-based liquid toner, the liquid toner acting as a pattern mask when printed on a substrate, the pattern mask being employed in patterning a surface of the substrate;
• an organosilane, the organosilane being coated on the surface of the substrate, the substrate surface to be patterned comprising a material compatible with the organosilane, the organosilane coating enhancing adhesion between the pattern mask and the substrate surface;
• and
• a lift-off agent that degrades a bond between the substrate and the pattern mask to facilitate removal of the pattern mask after substrate patterning,
• wherein the organosilane coating enhances adhesion during patterning of the substrate surface, while removal of the pattern mask is unhindered by the organosilane coating.