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US 8,029,756 B1Granted
Closed-loop silicon production
AssigneePeak Sun Sillcon Corporation
InventorJohn C. Schumacher
Life of this patent
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Abstract
A closed loop bromosilane process is provided to provide semiconductor grade silicon through the thermal decomposition of tribromosilane. The resulting silicon tetrabromide byproduct from this thermal decomposition is recycled in a silicon tetrabromide converter to produce converted tribromosilane.
Claims5
A method of closed loop silicon production, comprising:
- synthesizing tribromosilane (TBS) to produce synthesized TBS;
- thermally decomposing a feedstock tribromosilane (TBS) to produce silicon and a byproduct silicon tetrabromide (STB);
- and
- converting the byproduct STB into converted TBS by diluting the byproduct STB with hydrogen to provide a diluted mixture and passing the diluted mixture through a heated bed consisting essentially of silicon oxide particles at a temperature of 600 to 800° C., wherein the feedstock TBS comprises the synthesized TBS and the converted TBS, and wherein the heated bed of silicon oxide particles catalyzes.
1 more element
Dependencies are inferred from the claim text.