MEMS tunable device

A method of controlling a movable element of a micro-electromechanical device having a substrate, a movable element, a pair of electrodes arranged on the substrate and on the movable element to cooperate to move the movable element relative to the substrate, the method comprising:

• moving the movable element to a first intermediate position by supplying a single pulse of a maximum supply level to the electrodes, the maximum supply level at a level which is higher than a second level required to hold the movable element at the first intermediate position, wherein moving to the first intermediate position comprises increasing a gap between electrodes;
• and
• supplying the second level to stabilize the movable element at the first intermediate position after moving the movable element to the first intermediate position.

A method of controlling a movable element of a micro-electromechanical device having a substrate, a movable element, a pair of electrodes arranged on the substrate and on the movable element to cooperate to move the movable element relative to the substrate, the method comprising:

• moving the movable element to an intermediate position by supplying a sequence of pulses timed to dampen oscillations of the movable element to the electrodes during the movement, the pulses being at a level which is higher than a second level required to hold the movable element at the intermediate position, wherein moving to the intermediate position comprises decreasing a gap between electrodes;
• and
• supplying the second level to stabilize the movable element at the intermediate position after moving the movable element to the intermediate position.