Minute structure and its manufacturing method
AssigneeNikon Corporation
InventorMasatoshi Hayashi
Life of this patent
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Abstract
A manufacturing method of a minute structure having fine structures on opposing inner surfaces, includes the steps of forming a first pattern in a surface of a first layer, forming a sacrificial layer on the patterned surface of the first layer, forming a second pattern on a surface of the sacrificial layer, forming a second layer on the sacrificial layer and a portion of the surface of the first layer, and removing a member constituting the sacrificial layer. In the step of forming the first pattern on the first layer and the step of forming the second pattern on the sacrificial layer, the patterns are formed using the same alignment marks as references. This manufacturing method can realize highly accurate alignment even when plural lenses or DOEs are used.
Claims14
A manufacturing method of a minute structure having fine structures on opposing inner surfaces, comprising the steps of:
- forming a first pattern on a surface of a first layer;
- forming a sacrificial layer on said patterned surface of said first layer;
- forming a second pattern on a surface of said sacrificial layer;
- forming a second layer on said sacrificial layer and a portion of said surface of said first layer;
- and
- removing a member constituting said sacrificial layer, said manufacturing method further comprises:
- in said step of forming said first pattern on said first layer and said step of forming said second pattern on said sacrificial layer, said patterns are formed using same alignment marks as references.
A minute optical element in which a hollow portion is formed inside so as to be surrounded by a structure made of an optical material that transmits light having a wavelength used, wherein:
- the structure is formed of a resin material positioned on one side of a single substrate,
- the hollow portion of said structure has such three-dimensional shapes so as to be able to provide a desired optical characteristic for the light having said wavelength used, and
- the hollow portion of said structure has an opening to an outside space.
Dependencies are inferred from the claim text.