Apparatus for detecting particles on a glass surface and a method thereof
AssigneeSamsung Corning Precision Materials Co., Ltd.
InventorsHyunwoo Kim, Youngchae Ko, Sungjong Pyo, Taeho Keem
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AssigneeSamsung Corning Precision Materials Co., Ltd.
InventorsHyunwoo Kim, Youngchae Ko, Sungjong Pyo, Taeho Keem
Estimating the term…
The present invention relates to an apparatus for detecting particles on a glass surface and a method thereof, and more specifically, to an apparatus for detecting particles on a glass surface and a method thereof for exactly inspecting particles which may be created on a glass surface where micro circuits are deposited. The apparatus for detecting the particles on the glass surface in accordance with the present invention comprises laser beam irradiators for detecting particles on a glass substrate on upper and lower sides of the glass substrate at certain intervals, respectively, and wherein the irradiators are configured so that beams emitted from the laser beam irradiators can be irradiated in a direction vertical to a transferring direction of the glass substrate, thereby exactly detecting particles detached to the glass surface without exception.
A glass surface particle detecting apparatus for detecting particles existing on a surface of glass which is being transferred, comprising:
A glass surface's particle detecting method for detecting particles existing on a surface of glass which is being transferred, comprising the steps of:
A glass surface's particle detecting method for detecting whether particles existing on a surface of glass which is being transferred are attached to an upper side or a lower side of a glass substrate, comprising the steps of:
Dependencies are inferred from the claim text.