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US 8,026,736 B2Granted
Water-level charged device model for electrostatic discharge test methods, and apparatus using same
AssigneeIntel Corporation
InventorsTimothy J. Maloney, Bruce Chou
Life of this patent
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Abstract
A charged device model (CDM) electrostatic discharge (ESD) testing is carried out at wafer level. Wafer CDM pulses are repeatedly applied and monitored. The wafer CDM (WCDM) pulses are accomplished with a probe-mounted printed-circuit board and a high-frequency transformer that captures fast CDM pulses. Modeling of CDM and WCDM in the time and frequency domain illustrates the dominant effects, and shows that WCDM can reproduce all the major phenomena of package-level CDM testing.
Claims9
An apparatus for charged device model (CDM) electrostatic discharge (ESD) testing, comprising:
- a charge plate to be disposed above a semiconductor wafer;
- an electrical probe disposed above the charge plate and passing from above the charge plate to below the charge plate;
- a mechanical link to position the charge plate and electrical probe above the semiconductor wafer;
- a transformer coupled to the electrical probe;
- and
- control circuitry coupled to the transformer, wherein the transformer and control circuitry facilitate in situ pulse measurement.
3 more elements
Dependencies are inferred from the claim text.