Probe with bi-directional electrostatic actuation
AssigneeSeagate Technology LLC
InventorsDadi Setiadi, Wayne Bonin
Life of this patent
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Abstract
A probe system that has a probe body comprising at least three arms extending from a central region and a probe tip centrally located on the probe body in the central region. A substrate is proximate the probe body opposite the probe tip. A first electrode is positioned to provide a centrally positioned voltage across the probe body and the substrate and a second electrode set is positioned radially outward from the first electrode, to provide an outer voltage across at least one of the at least three arms and the substrate. The probe structure may have, for example, four arms. Methods of actuating the probe tip are provided.
Claims11
A probe system comprising:
- a probe body comprising four arms equally spaced apart and extending from the central region;
- a probe tip centrally located on the probe body in the central region;
- a substrate proximate the probe body opposite the probe tip;
- a supporting mechanism for the probe body between the central region and the at least four arms;
- a first electrode positioned to provide a centrally positioned voltage across the probe body and the substrate;
- and
- a second electrode set positioned on each of the four arms, to provide an outer voltage across at least one of the at least four arms and the substrate.
A method of actuating a probe tip, the method comprising:
- providing a probe system, the probe system comprising:
- a probe body comprising four arms equally spaced apart and extending from the central region;
- a probe tip centrally located on the probe body in the central region;
- a substrate proximate the probe body opposite the probe tip;
- a supporting mechanism for the probe body between the central region and the at least four arms;
- a first electrode positioned to provide a centrally positioned voltage across the probe body and the substrate;
- and
- a second electrode set positioned on each of the four arms, to provide an outer voltage across at least one of the at least three arms and the substrate;
- moving the probe tip toward a medium by applying a first voltage to a first electrode to provide voltage across the central region and an adjacent substrate;
- and
- moving the probe tip away from the medium by applying a second voltage to a second electrode set to provide voltage across at least one of the at least four arms and the adjacent substrate.
Dependencies are inferred from the claim text.