Process for measuring heat spreader tilt
AssigneeInternational Business Machines Corporation
InventorsMichael A. Gaynes, Edward J. Yarmchuk
Life of this patent
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Abstract
A process for measuring the thickness of an insulating material. The process includes providing a device used to measure capacitance, and electrically connecting the capacitance measuring device to a heat sink and an electrical, heat-generating component. The thickness of the insulating material is determined by measuring the capacitance of the insulating material according to tile formula: B=∈r∈oA/C, where B is the thickness of the insulating material, C is tile capacitance, A is the area of tile heat generating component, ∈o is the permittivity of free space and ∈r is the relative dielectric constant of the insulating material.
Claims10
A process for measuring heat spreader tilt comprising:
- providing an insulating material between a heat spreader and a semiconductor device;
- the heat spreader containing a plurality of conducting electrodes extending from one surface to the other surface of the heat spreader;
- electrically connecting a capacitance measuring device to the heat spreader and the semiconductor device;
- and
- measuring a capacitance of the insulating material at a plurality of locations defined by the plurality of conducting electrodes.
Dependencies are inferred from the claim text.