Thin film transistor, method of fabricating the same, and organic light emitting diode display device having the thin film transistor

A method of fabricating a thin film transistor (TFT), comprising:

• forming a protection layer comprising an amine-containing clay, on a substrate;
• forming a buffer layer on the protection layer;
• forming a semiconductor layer on the buffer layer;
• forming a gate insulating layer on the semiconductor layer and the buffer layer;
• forming a gate electrode on the gate insulating layer, in a position corresponding to the semiconductor layer;
• forming an interlayer insulating layer on the gate insulating layer and the gate electrode;
• and
• forming source and drain electrodes on the interlayer insulating layer, which are electrically connected to the semiconductor layer,
• wherein the clay has plate-shaped particles that are exfoliated and irregularly dispersed within the protection layer, and
• wherein the protection layer is formed by reacting a clay with an organic amine compound, such that positive metal ions in the clay are replaced by an organic ammonium salt.

A method of fabricating a thin film transistor (TFT), comprising:

• forming a protection layer comprising an amine-containing clay, on a substrate;
• forming a buffer layer on the protection layer;
• forming a gate electrode on the buffer layer;
• forming a gate insulating layer on the gate electrode;
• forming a semiconductor layer on the gate insulating layer, in a position corresponding to the gate electrode;
• and
• forming source and drain electrodes on the semiconductor layer, which are electrically insulated from the gate electrode,
• wherein the clay has plate-shaped particles that are exfoliated and irregularly dispersed within the protection layer, and
• wherein the forming of the protection layer comprises reacting a clay that is dispersed in water, with an organic amine compound, such that positive metal ions in the clay are replaced by an organic ammonium salt.

An organic light emitting diode (OLED) display device comprising:

• a substrate;
• a protection layer disposed on the substrate and comprising an amine-containing clay and an organic ammonium salt;
• a buffer layer disposed on the protection layer;
• a semiconductor layer disposed on the buffer layer;
• a gate electrode disposed on the semiconductor layer;
• a gate insulating layer to electrically insulate the semiconductor layer from the gate electrode;
• source and drain electrodes that are electrically insulated from the gate electrode and connected to the semiconductor layer;
• an interlayer insulating layer disposed on the gate insulating layer and the gate electrode;
• a first electrode electrically connected to the drain electrode;
• an organic layer disposed on the first electrode;
• and
• a second electrode disposed on the organic layer,
• wherein the clay has plate-shaped particles that are exfoliated and irregularly dispersed within the protection layer.