Laser surface treatment
AssigneesInstitute for Laser Technology, Panasonic Electric Works Co., Ltd.
InventorsKenichiro Tanaka, Masayuki Fujita
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Abstract
A laser surface treatment for reducing reflection loss on the surface of an optical material is provided. A metal film is formed on the surface of the optical material, and then the metal film is removed from the optical material by irradiation of an ultra-intense short-pulse laser beam having a pulse width of 1 femtosecond to 100 picoseconds, so that a fine periodic structure is formed on the surface of the optical material exposed by the removal of the metal film. The obtained fine periodic structure has asperities with a periodic interval of preferably 50 to 1000 nm, which can be controlled by changing the laser energy density.
Claims11
A process of developing a periodic structure in a surface of an optical transparent substrate, said process comprising the steps of:
- forming a metal film having a thickness of 50 nm to 1000 nm on a surface of said optical transparent substrate made of non-metal material;
- and
- irradiating an ultra-intense short-pulse laser beam having a pulse width of 1 femtosecond (fs) to 100 picoseconds (ps) to said metal film in order to ablate a portion of said metal film to generate within an ablated portion of said metal film, a resulting metal plasma, which interacts with said laser beam for etching the surface of said substrate, leaving a fine periodic structure having a periodic interval of 50 nm to 1000 nm in the surface thereof.
Dependencies are inferred from the claim text.