Method for producing electronic components and pressure sensor
AssigneeGrundfos Management A/S
InventorsJens Peter Krog, Gert Friis Eriksen, Karsten Dyrbye
Life of this patent
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Abstract
A method produces electronic components in particular electronic sensors for pressure and differential pressure measurement. Firstly, the semiconductor structure of the electronic components is produced on a wafer. An insulating oxide layer is then applied. A protective metal layer is subsequently applied. The metal layer is applied in sections only in those regions of the wafer in which no splitting, for example by mechanical separation, occurs later. The electronic components thus formed in the wafer are then divided up into individual elements.
Claims4
A method for producing electronic sensors for pressure measurement and/or differential pressure measurement comprising:
- producing, on a wafer, semiconductor structures of the electronic sensors;
- depositing at least one insulating layer on the wafer, including on separating location regions thereof;
- subsequently depositing at least one protective metal layer, wherein the metal layer is either
- (i) deposited only in regions outside of the separating location regions of the wafer, leaving the insulating layer in the separating location regions exposed, or
- (ii) deposited and portions thereof are subsequently removed from the separating location regions of the wafer, leaving the insulating layer in the separating location regions exposed;
- and
- dividing the wafer at the separating location regions into the electronic sensors, wherein for each electronic sensor the metal layer extends over a membrane region and a surrounding clamping region to at least a predetermined minimum distance from a closest peripheral edge of the electronic sensor formed by division of the wafer.
Dependencies are inferred from the claim text.