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US 8,026,040 B2Granted
Silicone coating composition
AssigneeAZ Electronic Materials USA Corp.
InventorsHengpeng Wu, WooKyu Kim, Hong Zhuang, PingHung Lu, Mark Neisser, David Abdallah, Ruzhi Zhang
Life of this patent
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Abstract
The present invention relates to a composition comprising: (a) a polymer having at least one repeating unit of formula where R1 is a non-hydrolysable group and n is an integer ranging from 1 to 3; and (b) a crosslinking catalyst. The composition is useful in forming low k dielectric constant materials and as well as hard mask and underlayer materials with anti-reflective properties for the photolithography industry.
Claims13
A composition comprising:
- (a) a polymer having at least one repeating unit of formula
- where R1 is a non-hydrolysable group and n is an integer ranging from 1 to 3 where the polymer is capable of being crosslinked with a crosslinking catalyst and further where the polymer is free of SiOH and SiOR groups where R is alkyl;
- and (b) a crosslinking catalyst which is selected from a compound having the formula Z+ A− and its hydrate, where Z is a cation selected from triarylsubstituted sulfonium, trialkylsubstituted sulfonium and a sulfonium which is substituted with a mixture of aryl and alkyl groups, and A is an anion containing a group selected from monocarboxylate and dicarboxylate.
Dependencies are inferred from the claim text.