Method for forming anti-reflective coating
AssigneeDow Corning Corporation
InventorsPeng-Fei Fu, Eric Scott Moyer, Craig Rollin Yeakle
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Abstract
A method of forming an antireflective coating on an electronic device comprising (A) applying to an electronic device an ARC composition comprising (i) a silsesquioxane resin having the formula (PhSiO(3-X)/2(OH)x)mHSiO(3-x)/2(OH)x)N(MeSiO(3-x)/2(OH)x)p where Ph is a phenyl group, Me is a methyl group, x has a value of 0, 1 or 2; m has a value of 0.05 to 0.95, n has a value of 0.05 to 0.95, p has a value of 0.05 to 0.95, and m+n+p≈1; and (ii) a solvent; and (B) removing the solvent and curing the silsesquioxane resin to form an antireflective coating on the electronic device.
Claims15
A method of forming an antireflective coating (ARC) on an electronic device comprising
- (A) applying to an electronic device an ARC composition comprising
- (i) a silsesquioxane resin having the formula
- (PhSiO(3-x)/2(OH)x)m(HSiO(3-x)/2(OH)x)n(MeSiO(3-x)/2(OH)x)p
- where Ph is a phenyl group, Me is a methyl group, x has a value of 0, 1 or 2;
- m has a value of 0.05 to 0.95, n has a value of 0.05 to 0.95, p has a value of 0.05 to 0.95, and m+n+p≈1;
- and
- (ii) a solvent selected from 1-methoxy-2-propanol, propylene methyl ether acetate and cyclohexanone;
- and
- (B) removing the solvent and curing the silsesquioxane resin to form an antireflective coating on the electronic device.
Dependencies are inferred from the claim text.