UV nanoimprint lithography process and apparatus

An ultraviolet (UV) nanoimprint lithography process for forming nanostructures on a substrate, comprising:

• preparing a stamp with at least two element stamps, a nanostructure being formed on a surface of each element stamp;
• applying resist on surfaces of the substrate or the element stamps;
• mounting the stamp and the substrate on a stamp chuck and a substrate chuck;
• moving the substrate chuck and the stamp chuck to press the resist toward the surfaces of the substrate or element stamps;
• selectively supplying pressure to a part of the substrate facing the element stamps to fill the resist into the nanostructures of the element stamps using a pressure supply unit for applying pressurized gas to a plurality of selected regions of the substrate facing the element stamps, the pressure supply unit being provided separable from the substrate chuck and is configured to move under the substrate chuck;
• wherein the pressure supply unit comprises a closure type of housing having a hollow cavity, a plurality of gas supply holes provided in the housing and connected to the hollow cavity, and a gas supplier for supplying gas to the hollow cavity, wherein the substrate chuck is configured to have a plurality of through holes connectable to the plurality of gas supply holes;
• providing UV light to the resist to cure the resist;
• separating the stamp from the substrate;
• changing a relative position between the substrate and the stamp;
• forming the cured resist in a predetermined region of the substrate by repeating the above steps;
• and forming the nanostructures on the substrate by using the cured resist.