Laser device and method for machining material using laser radiation
AssigneeCarl Zeiss Meditec AG
InventorsMark Bischoff, Dirk Mühlhoff, Mario Gerlach
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Abstract
Disclosed is a laser device for machining material, comprising a laser beam source which supplies pulsed laser radiation, and a variable deflection unit that introduces said laser radiation into the material at different, selectable points so as to create optical breakthroughs. The inventive laser device further comprises a pulse-selecting apparatus which modifies selected laser pulses of the pulsed laser radiation regarding at least one optical parameter in such a way that no more optical breakthroughs can be created using the modified laser pulses.
Claims14
A laser apparatus for material treatment, comprising:
- a source of laser radiation providing pulsed laser radiation comprising a train of laser pulses;
- and
- a deflecting device, which directs said laser radiation into the material at different, selectable locations to generate optical breakthroughs within the material;
- and
- a pulse picking device that modifies selected laser pulses of the train of laser pulses, with regard to at least one optical parameter of said selected laser pulses, such that the selected laser pulses cannot generate optical breakthroughs;
- and
- a control device operably coupled to the source of laser radiation, the deflecting device and the pulse picking device, and the control device being operable to monitor and control the source of laser radiation, the deflecting device and the pulse picking device;
- the control device being further operable to control the operation of the pulse picking device such that the pulse picking device influences said selected laser pulses such that only a remaining subset of not selected laser pulses cause optical breakthroughs within the material and such that a number of selected pulses varies in relation to a deflection speed of the deflecting device.
A method of material treatment by laser radiation, comprising
- generating pulsed laser radiation comprising a train of laser pulses via a laser source controlled by a control unit;
- variably deflecting the pulsed laser radiation into the material to generate optical breakthroughs within the material with a deflecting device that is controlled by the control unit;
- selecting a subset of selected laser pulses with a pulse picking device controlled by the control unit;
- and
- modifying the selected laser pulses of the train of laser pulses, with regard to an optical parameter of said selected laser pulses, such that the selected laser pulses no longer generate optical breakthroughs, wherein only a remaining subset of not selected laser pulses cause optical breakthroughs within the material and such that a number of selected pulses varies in relation to a deflection speed of the deflecting device.
Dependencies are inferred from the claim text.