System and method for valve sequencing in a pump
AssigneeEntegris, Inc.
InventorsGeorge Gonnella, James Cedrone, Iraj Gashgaee, Paul Magoon
Life of this patent
Estimating the term…
Abstract
Systems and methods for minimizing pressure fluctuations within a pumping apparatus are disclosed. Embodiments of the present invention may serve to reduce pressure variations within a fluid path of a pumping apparatus by avoiding closing a valve to create a closed or entrapped space in the fluid path and similarly, avoiding opening a valve between two entrapped spaces. More specifically, embodiments of the present invention may serve to operate a system of valves of the pumping apparatus according to a valve sequence configured to substantially minimize the time the fluid flow path through the pumping apparatus is closed (e.g. to an area external to the pumping apparatus).
Claims54
A method, comprising:
- introducing fluid into a pumping apparatus;
- operating a system of valves of the pumping apparatus according to a valve sequence to implement a dispense cycle;
- wherein the valve sequence is configured to minimize the time a flow path through the pumping apparatus is closed;
- and
- dispensing fluid from the pumping apparatus, wherein:
- the valve sequence is configured to actuate one valve at a time and the valve sequence comprises a delay between the operation of valves in the system of valves, and wherein the system of valves comprises:
- an inlet valve coupled to a feed chamber;
- an isolation valve between the feed chamber and a filter;
- a vent valve coupled to the filter and an area external to the pumping apparatus;
- a barrier valve between the filter and a dispense chamber;
- and
- a purge valve coupled to the dispense chamber and an area external to the pumping apparatus.
A system, comprising
- a pumping apparatus comprising a feed chamber, a dispense chamber and a system of valves operable to regulate the flow of fluid through the pumping apparatus;
- and
- a controller configured to implement a dispense cycle for the pumping apparatus wherein implementing the dispense cycle comprises regulating the opening and closing of the system of valves according to a valve sequence to dispense fluid from the pumping apparatus, the valve sequence configured to minimize the time a fluid flow path through the pumping apparatus is closed;
- wherein the valve sequence is configured to actuate one valve at a time and the valve sequence comprises a delay between the operation of valves in the system of valves, and wherein the system of valves comprises:
- an inlet valve coupled to a feed chamber;
- an isolation valve between the feed chamber and a filter;
- a vent valve coupled to the filter and an area external to the pumping apparatus;
- a barrier valve between the filter and a dispense chamber;
- and
- a purge valve coupled to the dispense chamber and an area external to the pumping apparatus.
Dependencies are inferred from the claim text.