Chamber lid lifting apparatus
AssigneeNational Semiconductor Corporation
InventorRoger P. Sarver
Life of this patent
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Abstract
A chamber lid lifting apparatus operable to lift a chamber lid of a semiconductor processing chamber is provided. The chamber lid lifting apparatus includes a handle. The handle includes a short end and a long end that together form a lever. The short end is operable to be temporarily coupled to a lid pivot point of the chamber lid. The long end is operable to transfer an applied force to the short end. The transferred force is operable to lift the chamber lid at the lid pivot point.
Claims20
A chamber lid lifting apparatus comprising:
- a handle comprising:
- a short end operable to be temporarily coupled to a lid pivot point of a chamber lid of a semiconductor processing chamber, the lid pivot point comprising a pivot bar;
- and
- a long end operable to form a lever with the short end, the long end operable to transfer an applied force to the short end in order to lift the chamber lid at the lid pivot point;
- and
- a pivot bar mount coupled to the short end of the handle, the short end of the handle operable to be temporarily coupled to the lid pivot point by the pivot bar mount, the pivot bar mount shaped to securably engage the pivot bar, the pivot bar mount comprising a chamber connection slot configured to receive a connection rod to temporarily couple the pivot bar mount to the chamber lid.
A chamber lid lifting apparatus, comprising:
- a pivot bar mount operable to be temporarily coupled to a lid pivot point of a chamber lid of a semiconductor processing chamber;
- and
- a handle coupled to the pivot bar mount, the handle operable to transfer an applied force to the pivot bar mount in order to lift the chamber lid at the lid pivot point;
- wherein the pivot bar mount comprises a chamber connection slot configured to receive a connection rod to temporarily couple the pivot bar mount to the chamber lid.
A chamber lid lifting apparatus, comprising:
- a pivot bar mount comprising a chamber connection slot;
- a connection rod operable to be placed through the chamber connection slot to temporarily couple the pivot bar mount to a chamber lid of a semiconductor processing chamber;
- and
- a handle coupled to the pivot bar mount, the handle operable to transfer an applied force to the pivot bar mount in order to lift the chamber lid.
Dependencies are inferred from the claim text.