Micro-machined temperature dependent one-shot valve and process for production thereof
AssigneeCanon Kabushiki Kaisha
InventorAlexis Debray
Life of this patent
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Abstract
A micro-machined temperature dependent one-shot valve is provided which has an operation temperature adjustable readily, causing no leakage below the operation temperature even at a high pressure difference, being useful both in a liquid environment and in a gas environment, and being miniaturizable. The micro-machined temperature dependent one-shot valve comprises a silicon substrate 100, a channel 101 penetrating the entire thickness of the silicon substrate, and a low melting point metal member 101 deposited on one face of the silicon substrate to obstruct the channel.
Claims18
A valve comprising:
- a silicon substrate;
- a channel penetrating an entire thickness of the silicon substrate;
- and
- a low melting point metal member deposited on one face of the silicon substrate to obstruct the channel,
- wherein a metal layer is provided between the low melting point metal member and the silicon substrate, and
- wherein the metal layer is formed from copper.
A valve comprising:
- a silicon substrate;
- a channel penetrating an entire thickness of the silicon substrate;
- and
- a low melting point metal member deposited on one face of the silicon substrate to obstruct the channel,
- wherein a metal layer is provided between the low melting point metal member and the silicon substrate, and
- wherein an adhesion layer is provided between the metal layer and the silicon substrate.
A valve comprising:
- a silicon substrate;
- a channel penetrating an entire thickness of the silicon substrate;
- and
- a low melting point metal member deposited on one face of the silicon substrate to obstruct the channel,
- wherein a surface of the low melting point metal member and a surface of the silicon substrate onto which the low melting point metal member is deposited are covered at least partly by a photoresist layer.
Dependencies are inferred from the claim text.