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US 8,024,977 B2Granted
Pressure sensor having a high full-scale value with package thereof
AssigneeSTMicroelectronics S.r.l.
InventorsBruno Murari, Giulio Ricotti, Luigi Della Torre, Andrea Lorenzo Vitali
Life of this patent
Estimating the term…
Abstract
A pressure sensor including a pressure-sensor element having a monolithic body of semiconductor material, and a first main face and a second main face acting on which is a stress resulting from a pressure, the value of which is to be determined; and a package enclosing the pressure-sensor element. The package has an inner chamber containing liquid material, and the pressure-sensor element is arranged within the inner chamber in such a manner that the first and second main faces are both in contact with the liquid material. In particular, the liquid material is a silicone gel.
Claims31
A pressure sensor for use with liquid material, comprising:
- a pressure-sensor element having a monolithic body of semiconductor material, a first side face, a second side face, a first main face, and a second main face, the pressure-sensor element structured to sense a pressure on the second main face;
- and
- a package structured to enclose the pressure-sensor element, the package including an inner chamber having opposing side walls, a top wall, and a bottom wall and structured to contain the liquid material, the pressure-sensor element arranged within the inner chamber in such a manner that the first and second side faces are in contact with the respective opposing side walls of the chamber so that the liquid material will be in contact with both the first main face and the second main face.
A braking system, comprising:
- a pressure sensor having a pressure-sensor element formed of a monolithic body of semiconductor material with a first main face, a second main face, and first and second opposing side faces, the pressure-sensor element structured to sense a pressure on the second main face;
- and
- a package enclosing the pressure-sensor element, the package having an inner chamber having a top wall, a bottom wall, and opposing first and second side walls, the inner chamber containing liquid material, the pressure-sensor element arranged within the inner chamber in such a manner that the first and second side faces are in contact with the first and second side walls and the first main face and the second main face are both in contact with the liquid material.
A device for sensing pressure, comprising:
- a sensor formed of a monolithic body having opposing first and second side faces, a first main face and an opposing second main face, the first main face having a compliant membrane adapted to respond to the pressure, the sensor having a circuit structured to generate an electric signal in response to the pressure applied to the compliant membrane;
- and
- a housing having an interior chamber and a first wall structured to move in response to the pressure, the interior chamber having opposing first and second side walls and configured to receive the sensor with the first main face facing the first wall of the housing and the first and second side faces in contact with the first and second side walls, the housing structured to contain liquid in the chamber to transmit pressure between the first main face of the sensor and the first wall of the housing.
A pressure sensor for use with liquid material, comprising:
- a pressure-sensor element having a monolithic body of semiconductor material, a first main face, and a second main face, the pressure-sensor element structured to sense a pressure on the second main face, the monolithic body having a sensitive region on which the pressure acts, the pressure-sensor element further including at least one high-pressure detection element of a piezoresistive type and having a resistance that varies as a function of the sensed pressure and structured in a portion of the sensitive region, the monolithic body having a thickness, and the portion of the sensitive region being solid and having a respective thickness substantially equal to the thickness of the monolithic body, the monolithic body further including a cavity contained and completely isolated within the monolithic body and surrounded by a membrane that is flexible and deformable as a function of the sensed pressure, the membrane arranged within the sensitive region and laterally surrounded by the portion of the sensitive region, and at least one low-pressure detection element of a piezoresistive type integrated in the membrane and having a resistance that varies as a function of the deformation of the membrane, the high-pressure detection element and the low-pressure detection element not being electrically connected to one another;
- and
- a package structured to enclose the pressure-sensor element, the package including an inner chamber structured to contain the liquid material, the pressure-sensor element arranged within the inner chamber in such a manner that the first main face and the second main face can be in contact with the liquid material when the liquid material is in the inner chamber.
A pressure sensor for use with liquid material, comprising:
- a pressure-sensor element having a monolithic body of semiconductor material, a first main face, and a second main face, the pressure-sensor element structured to sense a pressure on the second main face;
- a package structured to enclose the pressure-sensor element, the package including an inner chamber structured to contain the liquid material, the pressure-sensor element arranged within the inner chamber in such a manner that the first main face and the second main face will be in contact with the liquid material when the liquid material is in the chamber;
- and
- a plurality of supporting elements structured to support the pressure-sensor element within the inner chamber, the first main face and the second main face both in contact with the supporting elements, the supporting elements including anchorages arranged between the first and second main faces and side walls of the inner chamber, the anchorages configured to support the monolithic body in a laterally arrangement in contact with the chamber side walls.
1 more element
A pressure sensor for use with liquid material, comprising:
- a pressure-sensor element having a monolithic body of semiconductor material, a first main face, and a second main face, the pressure-sensor element structured to sense a pressure on the second main face;
- a package structured to enclose the pressure-sensor element, the package including an inner chamber structured to contain the liquid material, the pressure-sensor element arranged within the inner chamber in such a manner that the first main face and the second main face will be in contact with the liquid material when the liquid material is in the chamber;
- and
- a plurality of supporting elements structured to support the pressure-sensor element within the inner chamber, the first main face and the second main face both in contact with the supporting elements, the supporting elements are structured as pillars arranged between the first and second main faces and, respectively, a top wall and bottom wall of the chamber, the pillars configured in such a manner that the monolithic body is arranged laterally in contact with side walls of the chamber.
1 more element
Dependencies are inferred from the claim text.