Semiconductor acceleration sensor
AssigneeOki Semiconductor Co., Ltd.
InventorsAkihiko Nomura, Kenji Kato
Life of this patent
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Abstract
A semiconductor acceleration sensor includes an acceleration sensor chip that includes a weight portion, a base portion provided around the weight portion with a gap therebetween, and beam portions flexibly connecting the weight portion and the base portion; and a stopper plate that is provided above the acceleration sensor chip. The stopper plate includes: a plurality of fixing portions that are protrudingly provided at positions opposite to the base portion and are fixed to the base portion; first concave portions that are formed around the fixing portions at positions opposite to the weight portion and define the displacement of the weight portion; and a second concave portion that is formed at a position opposite to the beam portions and is deeper than the first concave portion.
Claims6
A semiconductor acceleration sensor comprising:
- an acceleration sensor chip that includes a weight portion, a base portion provided around the weight portion with a gap therebetween, and beam portions flexibly connecting the weight portion and the base portion;
- and
- a stopper plate that is provided above the acceleration sensor chip,
- wherein the stopper plate comprises:
- a plurality of fixing portions that are protrudingly provided at positions opposite to the base portion and are fixed to the base portion;
- first concave portions that are formed around the fixing portions at positions opposite to the weight portion and define the displacement of the weight portion;
- and
- a second concave portion that is formed at a position opposite to the beam portions and is deeper than the first concave portion.
Dependencies are inferred from the claim text.