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US 8,024,959 B2Granted
Gas sensor and gas detection method
AssigneeTaiyo Yuden Co., Ltd.
InventorsToru Hara, Takashi Ishiguro
Life of this patent
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Abstract
A gas sensor contains such a dielectric substance having a domain boundary formed between domains with different polarization directions. When a gaseous molecule is adsorbed to the dielectric substance, a transient current is generated due to displacement of the domain boundary under an applied voltage. The adsorbed gaseous molecule is detected by measuring the transient current.
Claims13
A gas sensor comprising:
- a dielectric thin film composed of a crystal having domain boundaries formed between immediately adjacent domains having different polarization directions, and
- a voltage applying unit for applying a voltage to the dielectric thin film for measuring a transient current generated when a gaseous molecule is absorbed to the dielectric thin film,
- wherein the transient current is generated due to shifting of the domain boundaries and is measured to determine the concentration of the adsorbed gaseous molecule.
A gas sensor comprising:
- a dielectric thin film composed of a crystal having domain boundaries formed between immediately adjacent domains having different polarization directions, and
- a voltage applying unit for applying a voltage to the dielectric thin film for measuring a transient current generated when a gaseous molecule is absorbed to the dielectric thin film,
- wherein the crystal of the dielectric thin film contains domains having a polarization direction of other than 180°.
A gas sensor comprising:
- a dielectric thin film composed of a crystal having domain boundaries formed between immediately adjacent domains having different polarization directions,
- a voltage applying unit for applying a voltage to the dielectric thin film for measuring a transient current generated when a gaseous molecule is absorbed to the dielectric thin film,
- a heating unit for heating the dielectric thin film, and
- an insulative substrate on which the heating unit is formed, said heating unit being capable of generating heat on its surface under an applied voltage, wherein
- the dielectric thin film is formed on the heating unit via an insulative film interposed between the dielectric thin film and the heating unit, and
- the voltage applying unit comprises an electrode unit formed on the dielectric thin film, having two electrodes facing each other at a given distance, capable of applying a voltage for measuring a transient current corresponding to a gas concentration.
3 more elements
Dependencies are inferred from the claim text.