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US 8,020,216 B2Granted
Tapered probe structures and fabrication
AssigneeThe Regents of the University of California
InventorSungho Jin
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Abstract
Probe structures and fabrication techniques are described. The described probe structures can be used as probes for various applications such as conductance measurement probes, field emitter probes, nanofabrication probes, and magnetic bit writing or reading probes.
Claims23
A method, comprising:
- placing a mask membrane and a substrate to be processed at two different positions relative to each other within a deposition chamber, the mask membrane comprising a through hole;
- directing a flow of a deposition material towards the mask membrane and the substrate through the through hole of the mask membrane to deposit the deposition material onto the mask membrane including the through hole and the substrate;
- and
- controlling a duration of the flow of the deposition material to form a tapered structure on the substrate whose dimension reduces along a direction from the substrate towards a tip of the tapered structure,
- wherein the through hole is formed to have a tapered opening that narrows from the mask towards the substrate.
2 more elements
Dependencies are inferred from the claim text.