Stage device

A stage device having a first table movable in one horizontal direction and in a direction perpendicular to the one horizontal direction and a second table supported by a support portion on the first table so as to enable rotation around a vertical axis and guided so as to enable movement in a vertical direction by a guide portion, comprising:

• a plurality of detectors that are arranged apart from each other in the one horizontal direction on the second table and detect a position or a velocity in a vertical direction of the second table;
• a plurality of motors that are arranged apart from each other in the one horizontal direction on the second table and drive the second table in the vertical direction of the second table;
• and
• a controller that controls the drives of the plurality of motors based on detected values which are detected by each of the plurality of detectors, wherein
• the second table is supported at a central portion thereof by the support portion, and
• the guide portion slidably couples with the second table by compressed air, and wherein
• the controller
• controls the plurality of motors so as to be independent from each other, translationally moves the second table in the vertical direction based on an added value of the detected values detected by each of the plurality of detectors, and controls an angular velocity in a pitching direction of the second table based on a subtracted value of the detected values detected by each of the plurality of detectors, such that the angular velocity becomes zero to dampen pitching vibration, and further
• calculates a vertical-direction thrust command based on a difference between the added value of the detected values detected by each of the plurality of detectors and a command value of the vertical direction position, and
• calculates a pitching-direction thrust command based on a difference between the subtracted value of the detected values detected by each of the plurality of detectors and a command value of the angular velocity of the pitching direction,
• outputs a sum of the vertical-direction thrust command value and the pitching-direction thrust command value to one of the plurality of motors, and
• outputs a difference between the vertical-direction thrust command value and the pitching-direction thrust command value to one of the plurality of motors.