Micro-electromechanical device and module and method of manufacturing same
AssigneeNXP B.V.
InventorsJozef Thomas Martinus Van Beek, Peter Gerard Steeneken
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Abstract
The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components.
Claims17
An electronic device comprising a microelectromechanical system (MEMS) element, the element comprising first and second electrodes wherein the first electrode has a surface area larger than that of the second electrode to improve isolation and an intermediate beam with first and second opposing conductive side faces, the first side face facing the first electrode and the second side face facing the second electrode, which beam is movable by application of a driving voltage between said first and second electrodes, wherein the beam is embodied as a third electrode wherein the third electrode is substantially elastic, such as to be attachable with a first surface area at one edge to the second electrode and with a second surface area at an opposite edge to the first electrode, and such that on application of an actuation voltage the ratio of first to second surface area is changeable;
- and characterized in that:
- the second electrode and the second conductive side face of the beam form with an intermediate dielectric a first switchable capacitor that is connected in a signal path between an input and an output, and the first electrode and the first side face of the beam form with an intermediate dielectric a second switchable capacitor, that is coupled from the signal path to ground.
An electronic device comprising a passive network which includes thin film components and a microelectromechanical systems (MEMS) element provided on a substrate, the MEMS element comprising first and second electrodes wherein the second electrode is provided with a surface area that is smaller than that of the first electrode, which electrodes are provided in planes that are substantially parallel to the substrate, an intermediate beam being provided between said first and second electrodes, said intermediate beam having first and second opposing conductive side faces, the first side face facing the first electrode and the second side face facing the second electrode, which beam is movable by application of a driving voltage between said first and second electrodes;
- wherein the first and second conductive side faces are part of the same electrically conductive layer being a third electrode and wherein a sacrificial layer used in the manufacture of the MEMS element forms a dielectric layer of the thin film components, and the layers of the second and third electrode also define electrodes of the thin film components.
Dependencies are inferred from the claim text.