Micro-electro-mechanical transducer having a surface plate
AssigneeKolo Technologies, Inc.
InventorYongli Huang
Life of this patent
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Abstract
A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a base, a spring layer placed over the base, and a mass layer connected to the spring layer through a spring-mass connector. The base includes a first electrode. The spring layer or the mass layer includes a second electrode. The base and the spring layer form a gap therebetween and are connected through a spring anchor. The mass layer provides a substantially independent spring mass contribution to the spring model without affecting the equivalent spring constant. The mass layer also functions as a surface plate interfacing with the medium to improve transducing performance. Fabrication methods to make the same are also disclosed.
Claims15
A method for fabricating a micro-electro-mechanical device having a movable mechanical part to transform energy, the method comprising the steps of:
- forming at least one spring anchor on either a front side of a substrate wafer or a bottom side of a spring layer;
- forming at least one spring-mass connector of a desired height either on the spring layer or on a mass layer;
- and
- joining the substrate wafer, the spring layer and the mass layer such that the spring layer and the substrate wafer are joined through the spring anchor to define a gap therebetween, the mass layer and the spring layer are joined through the spring-mass connector.
Dependencies are inferred from the claim text.