Method for providing a perpendicular magnetic recording (PMR) head
AssigneeWestern Digital (Fremont), LLC
InventorsLei Larry Zhang, Yong Shen, Honglin Zhu, Yizhong Wang
Life of this patent
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Abstract
A method for providing a perpendicular magnetic recording head includes providing a metal underlayer and forming a trench in the metal underlayer. The trench has a bottom and a top wider than the bottom. The method also includes providing a PMR pole. At least a portion of the PMR pole resides in the trench. The method also includes providing a write gap on the PMR pole and providing a top shield on at least the write gap.
Claims9
A method for providing a perpendicular magnetic recording (PMR) head comprising:
- providing a metal underlayer;
- forming a trench in the metal underlayer, the trench having a bottom and a top wider than the bottom, the step of forming the trench further including providing a chemical mechanical planarization (CMP) stop layer on the metal underlayer;
- providing a PMR pole, at least a portion of the PMR pole residing in the trench;
- providing a write gap on the PMR pole;
- and
- providing a top shield on at least the write gap.
A method for providing a perpendicular magnetic recording (PMR) head comprising:
- providing a metal underlayer;
- forming a trench in the metal underlayer, the trench having a bottom and a top wider than the bottom;
- providing a PMR pole, at least a portion of the PMR pole residing in the trench;
- providing a write gap on the PMR pole;
- and
- providing a top shield on at least the write gap;
- wherein the step of providing the PMR pole further includes
- providing a seed layer;
- depositing at least one magnetic pole layer;
- and
- removing a portion of the at least one magnetic pole layer, a remaining portion of the at least one magnetic pole layer forming the PMR pole.
A method for providing a perpendicular magnetic recording (PMR) head comprising:
- providing a metal underlayer, wherein the providing the metal underlayer further includes providing a magnetic metal underlayer;
- forming a trench in the metal underlayer, the trench having a bottom and a top wider than the bottom;
- providing a PMR pole, at least a portion of the PMR pole residing in the trench;
- providing a write gap on the PMR pole
- providing a top shield on at least the write gap.
A method for providing a perpendicular magnetic recording (PMR) head comprising:
- providing an insulating base layer;
- providing a metal underlayer on the insulating base layer, the metal underlayer being a magnetic metal underlayer;
- providing a mask on the metal underlayer, the mask having an aperture therein;
- performing at least one of a metal reactive ion etch and an ion beam etch to remove a portion of the metal underlayer exposed by the aperture, thereby forming a trench in the metal underlayer, the trench having a bottom and a top wider than the bottom and extending through the metal underlayer;
- providing a PMR pole, at least a portion of the PMR pole residing in the trench;
- providing a write gap on the PMR pole;
- and
- providing a top shield on at least the write gap.
Dependencies are inferred from the claim text.