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US 8,014,969 B2Granted
Test apparatus, test method and manufacturing method
AssigneeAdvantest Corporation
InventorsHirokatsu Niijima, Koji Hara, Noriyoshi Kozuka, Kohei Shibata, Tetsuya Sakaniwa
Life of this patent
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Abstract
There is provided a test apparatus for testing a plurality of devices under test. The test apparatus includes a signal input section that applies a test signal to the devices under test so as to cause the devices under test to concurrently output response signals, a combining section that generates a single combination signal by using the response signals output from the devices under test, and a judging section that judges whether the devices under test operate normally with reference to the combination signal.
Claims9
A test apparatus for testing a plurality of devices under test, comprising:
- a signal input section that applies a test signal to the devices under test so as to cause the devices under test to concurrently output response signals that are the same as each other;
- a combining section that generates a single combination signal by using the response signals output from the devices under test;
- a judging section that judges whether the devices under test operate normally with reference to the combination signal;
- and
- a calibration section that measures, prior to the test of the devices under test, a level of the combination signal which is generated when causing one or more of the devices under test and the one or more remaining devices under test to output response signals such that the response signals output by the one or more devices under test have logic values different from those output by the one or more remaining devices under test, and designates the threshold value in accordance with the measured level of the combination signal, wherein
- the combining section generates a signal by combining the response signals in an analog manner, as the combination signal, and
- the judging section judges whether the devices under test operate normally by determining whether a signal level of the combination signal is higher than a predetermined threshold value at a predetermined timing.
4 more elements
A test method for testing a plurality of devices under test, comprising:
- applying a test signal to the devices under test so as to cause the devices under test to concurrently output response signals that are the same as each other;
- generating a single combination signal using the response signals output from the devices under test by combining the response signals in an analog manner, as the combination signal;
- judging whether the devices under test operate normally with reference to the combination signal by determining whether a signal level of the combination signal is higher than a predetermined threshold value at a predetermined timing;
- and
- measuring, prior to the test of the devices under test, a level of the combination signal which is generated when causing one or more of the devices under test and the one or more remaining devices under test to output response signals such that the response signals output by the one or more devices under test have logic values different from those output by the one or more remaining devices under test, and designating the threshold value in accordance with the measured level of the combination signal.
2 more elements
A manufacturing method for manufacturing electronic devices, comprising:
- forming a plurality of electronic devices;
- and
- selecting one or more of the electronic devices which operate normally by testing the formed electronic devices, to manufacture normally-operating electronic devices, wherein
- the selecting includes:
- applying a test signal to the electronic devices so as to cause the electronic devices to concurrently output response signals that are the same as each other;
- generating a single combination signal using the response signals output from the electronic devices by combining the response signals in an analog manner, as the combination signal;
- and
- judging whether the electronic devices operate normally with reference to the combination signal by determining whether a signal level of the combination signal is higher than a predetermined threshold value at a predetermined timing,
- the manufacturing method further including measuring, prior to the selecting, a level of the combination signal which is generated when causing one or more of the electronic devices and the one or more remaining electronic devices to output response signals such that the response signals output by the one or more electronic devices have logic values different from those output by the one or more remaining electronic devices, and designating the threshold value in accordance with the measured level of the combination signal.
6 more elements
Dependencies are inferred from the claim text.