Regenerative ring resonator
AssigneeCymer, Inc.
InventorsHong Ye, Richard L. Sandstrom, Slava Rokitski, Daniel J. W. Brown, Robert J. Rafac
Life of this patent
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AssigneeCymer, Inc.
InventorsHong Ye, Richard L. Sandstrom, Slava Rokitski, Daniel J. W. Brown, Robert J. Rafac
Estimating the term…
A laser includes a regenerative ring resonator that includes a discharge chamber having electrodes and a gain medium between the electrodes for producing a laser beam; a partially-reflective optical coupler, and a beam modification optical system in the path of the laser beam. The beam modification optical system transversely expands a profile of the laser beam such that the near field laser beam profile uniformly fills each aperture within the laser and such that the regenerative ring resonator remains either conditionally stable or marginally unstable when operating the laser at powers that induce thermal lenses in optical elements inside the regenerative ring resonator.
A laser comprising:
A method of modifying a laser beam of an electric discharge gas laser, the method comprising:
A regenerative ring resonator in the path of a laser beam, the resonator comprising:
Dependencies are inferred from the claim text.