Sample analyzing method, sample analyzing apparatus, manufacturing method of organic EL element, manufacturing equipment, and recording medium

A manufacturing equipment of an organic EL element in which film depositions of a plurality of layers are gradually executed in a plurality of film forming chambers, comprising:

• a spectroscopic ellipsometer that is installed outside film forming chamber and measures a film thickness of a film deposition product;
• a first transmission window that is obliquely installed in said film forming chamber and transmits an incident light from said spectroscopic ellipsometer;
• a second transmission window that is obliquely installed in said film forming chamber and transmits a reflected light to the spectroscopic ellipsometer;
• and
• a feeding device for feeding the film deposition product to the film forming chamber installed in a next stage, when the film thickness measured by the spectroscopic ellipsometer achieves a preset film thickness.

A manufacturing equipment of an organic EL element in which film depositions of a plurality of layers are gradually executed in a plurality of film forming chambers, comprising:

• a spectroscopic ellipsometer that is installed outside film forming chamber and measures a film thickness of a film deposition product;
• and
• a first transmission window that is obliquely installed in said film forming chamber and transmits an incident light from said spectroscopic ellipsometer;
• a second transmission window that is obliquely installed in said film forming chamber and transmits a reflected light to the spectroscopic ellipsometer;
• and
• means for feeding the film deposition product to the film forming chamber installed in a next stage, when the film thickness measured by the spectroscopic ellipsometer achieves a preset film thickness.