US 8,013,982 B2 · Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method

Abstract

A drive unit drives a wafer stage in a Y-axis direction based on a measurement value of an encoder that measures position information of the wafer stage in the Y-axis direction and based on information on the flatness of a scale that is measured by the encoder. In this case, the drive unit can drive the wafer stage in a predetermined direction based on a measurement value after correction in which a measurement error caused by the flatness of the scale included in the measurement value of the encoder is corrected based on the information on the flatness of the scale. Accordingly, the wafer stage can be driven with high accuracy in a predetermined direction using the encoder, without being affected by the unevenness of the scale.

Claims22

Dependent claims

A movable body drive method in which a movable body is driven substantially along a predetermined plane, the method including:

obtaining information on flatness of a scale having a grating whose periodic direction is a predetermined direction within a plane parallel to the predetermined plane;
and
measuring position information of the movable body in the predetermined direction using an encoder that has a head that irradiates a detection light to the scale and receives a reflected light from the scale, and driving the movable body in the predetermined direction based on the measurement value and the information on flatness of the scale,
wherein the information on flatness of the scale relates to a measurement error of the encoder due to a deviation or a displacement of a grating surface of the scale from a plane.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

11/896,412Filed 31 Aug 2007 · us provisional application

Priority

JP 2006-23697531 Aug 2006

Published

US 2008/0218713 A111 Sep 2008

Granted

6 Sep 2011

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

G03F 7/70775
Handling of masks or workpieces: position control, e.g. interferometers or encoders for determining the stage position
G03F 7/70341
Mask projection systems: details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
G03F 7/70516
Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring…:…
G03F 7/70725
Stages: control

Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method

Life of this patent

Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method

Life of this patent

Abstract

Claims22