Active-matrix device, electro-optical display device, and electronic apparatus

An active-matrix device, comprising:

• a substrate;
• a plurality of pixel electrodes provided on a first surface of the substrate;
• a plurality of switching elements provided to correspond to each of the pixel electrodes, each of the switching elements including:
• a fixed electrode connected to each of the pixel electrodes;
• a movable electrode made substantially of silicon, the movable electrode being displaceable so as to contact with and separate from the fixed electrode;
• a driving electrode provided to oppose the movable electrode via an electrostatic gap;
• a first wiring connected to the movable electrode;
• a second wiring connected to the driving electrode,
• wherein a voltage is applied between the movable electrode and the driving electrode to generate an electrostatic attraction between the movable electrode and the driving electrode so as to displace the movable electrode such that the movable electrode contacts the fixed electrode to electrically connect the first wiring to the pixel electrode;
• and
• the pixel electrodes being located so as to cover the switching element corresponding to the pixel electrode when viewed in a two-dimensional direction,
• wherein a thin film made of a material having a conductivity higher than that of silicon is formed on the movable electrode.