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US 8,013,623 B2Granted
Double sided probing structures
AssigneeCascade Microtech, Inc.
InventorsTerry Burcham, Peter McCann, Rod Jones
Life of this patent
Estimating the term…
Abstract
A test configuration for double sided probing of a device under test includes a holder to secure the device under test in a first orientation, a calibration substrate secured in a second orientation and a probe capable of calibration using the calibration substrate and probing the device under test.
Claims5
A probing structure comprising:
- (a) a holder for supporting a device under test being maintained in one of a horizontal and a vertical orientation;
- (b) a calibration substrate including a calibration structure surface being maintained in an orientation substantially perpendicular to said one of said horizontal and said vertical orientation;
- (c) a probe element including a contacting portion;
- (d) a probe positioner supporting said probe element, said probe element supportable in a first orientation enabling said contacting portion to engage said calibration structure surface and, alternatively, supportable in a second orientation enabling said contacting portion to engage said device under test, wherein said probe positioner changeable from said first orientation to said second orientation without being capable of probing at all of the intermediate orientations between said first orientation and said second orientation;
- and
- wherein said probe positioner comprising a stand and a pivot block hingedly connected to said stand, said stand comprising an adjustment mechanism enabling translation of said pivot block in at least one direction without movement of said stand.
3 more elements
Dependencies are inferred from the claim text.