Sensor apparatus for detecting variations in a dynamic quantity while suppressing detection deviations that are caused by bending deformation of a sensor chip
AssigneeDenso Corporation
InventorsTakashi Katsumata, Masaki Takashima, Mikio Sugiki
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Abstract
A miniaturized sensor such as a micro-accelerometer includes a sensor chip having a sensor element mounted thereon, with the sensor element being oriented with its central axes passing through the corners of the sensor chip. The corners of the sensor element are thereby located substantially apart from the corners of the sensor chip, so that bending deformation which displaces corners of the sensor chip is substantially prevented from causing displacement of corners of the sensor element. Detection inaccuracy resulting from such displacement can thereby be prevented or reduced.
Claims5
A sensor apparatus comprising
- a sensor chip,
- a sensor element mounted on said sensor chip, comprising a plurality of detection blocks for producing respective detection signals in accordance with an externally applied dynamic quantity, and
- a differential output circuit coupled to receive said detection signals produced by said detection blocks, for thereby deriving a differential output signal indicative of said dynamic quantity while canceling extraneous components of said detection signals, where said extraneous components result from disturbance forces acting on said sensor element,
- wherein said sensor element is disposed with each of respective central axes thereof coinciding with at least one corner of said sensor chip, and
- wherein said sensor element is of rectangular shape, said sensor chip is of rhomboid shape, and said central axes of said sensor element coincide with respective pairs of diagonally opposite corners of said sensor chip.
A sensor apparatus comprising a sensor chip,
- a sensor element mounted on said sensor chip, comprising a plurality of detection blocks for producing respective detection signals in accordance with an externally applied dynamic quantity, and
- a differential output circuit coupled to receive said detection signals produced by said detection blocks, for thereby deriving a differential output signal indicative of said dynamic quantity while canceling extraneous components of said detection signals, where said extraneous components result from disturbance forces acting on said sensor element,
- wherein said sensor element is disposed with each of respective central axes thereof coinciding with at least one corner of said sensor chip, and
- wherein said sensor element is disposed on an upper face of said sensor chip and each of respective side faces of said sensor chip has at least a portion thereof formed to slope inward to a lower face of said sensor chip, for thereby reducing an area of contact between said lower face and a component which is to be joined to said sensor chip at said lower face.
A sensor apparatus comprising a sensor chip,
- a sensor element mounted on said sensor chip, comprising a plurality of detection blocks for producing respective detection signals in accordance with an externally applied dynamic quantity, and
- a differential output circuit coupled to receive said detection signals produced by said detection blocks, for thereby deriving a differential output signal indicative of said dynamic quantity while canceling extraneous components of said detection signals, where said extraneous components result from disturbance forces acting on said sensor element,
- wherein said sensor element is disposed with each of respective central axes thereof coinciding with at least one corner of said sensor chip, and
- wherein said sensor element is disposed on an upper face of said sensor chip and wherein each of respective corners of said sensor chip is formed with a lower portion thereof removed, for thereby reducing an area of contact between a lower face of said sensor chip and a component which is joined to said sensor chip at said lower face.
Dependencies are inferred from the claim text.