Biosensor using nanoscale material as transistor channel and method of fabricating the same

A biosensor comprising:

• a plurality of insulating films including more than two interlayer insulating films;
• a first signal line and a second signal line between the plurality of insulating films, the first and second lines being insulated from each other by at least one interlayer insulating film;
• a semiconductor nanostructure on the plurality of insulating films, the semiconductor nanostructure having a first side electrically connected to the first signal line and a second side electrically connected to the second signal line;
• a plurality of probes coupled to the semiconductor nanostructure;
• a first contact penetrating at least one of the more than two interlayer insulating films to electrically connect the first signal line with the first side of the semiconductor nanostructure;
• and
• a second contact penetrating at least two of the more than two interlayer insulating films to electrically connect the second signal line with the second side of the semiconductor nanostructure.

A method of fabricating a biosensor, comprising:

• disposing a semiconductor nanostructure on a substrate;
• forming a plurality of insulating films, a first signal line, and a second signal line on the semiconductor nanostructure, the first signal line being electrically connected to a first side of the semiconductor nanostructure and the second signal line being electrically connected to a second side of the semiconductor nanostructure;
• exposing the semiconductor nanostructure by removing the substrate;
• and
• coupling a plurality of probes to the semiconductor nanostructure.