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US 8,013,301 B2Granted
Measurement system and a method
AssigneeApplied Materials Israel Ltd.
InventorAviram Tam
Life of this patent
Estimating the term…
Abstract
The invention provides a method and a measurement system. The method includes: providing a measurement model that includes measurement image information; locating a measurement area image area by utilizing the measurement image information; and performing at least one measurement to provide measurement result information.
Claims14
A method, comprising:
- receiving, by a measurement system, a measurement model for a measurement area of a sample, said measurement model comprising measurement image information, reference measurement information representative of measurements to be made using the measurement model and edge information;
- locating, by the measurement system, the measurement area of the sample by (i) locating a vicinity area that includes the measurement area of the sample by detecting a target and then displacing a scanning beam from the target by a predefined displacement amount, and (ii) locating the measurement area of the sample within the vicinity area by applying image processing utilizing the measurement image information of the measurement model;
- locating, by the measurement system, edges of structural features within the measurement area of the sample by searching in a proximity of reference edges defined in the edge information;
- performing, by the measurement system, at least one measurement of the measurement area of the sample based on the located edges of the structural features and the reference measurement information included in the measurement model;
- and
- providing, by the measurement system, measurement result information to a user.
3 more elements
A system comprising:
- a processor, wherein the processor is enabled to:
- generate or receive a measurement model for a measurement area of a sample, said measurement model comprising measurement image information, reference measurement information representative of measurements to be made using the measurement model and edge information,
- locate the target measurement area of the sample by (i) locating a vicinity area that includes the measurement area of the sample by detecting a target and then displacing a scanning beam of the scanner from the target by a predefined displacement amount, and (ii) locating the measurement area of the sample within the vicinity area by applying image processing utilizing the measurement image information of the measurement model,
- locate edges of structural features within the measurement area of the sample by searching in a proximity of reference edges defined in the edge information,
- perform at least one measurement of the measurement area of the sample based on the located edges of the structural features and the reference measurement information included in the measurement model,
- control the scanner, and
- process multiple detection signals received from a detector;
- the scanner, in communication with the processor, wherein the scanner is enabled to scan the measurement area of the sample with the scanning beam;
- and
- the detector, in communication with the processor, wherein the detector is positioned to receive charged particles resulting from an interaction between the measurement area of the sample and the scanning beam and is enabled to provide the multiple detection signals, based on the received charged particles, to the processor.
7 more elements
A system comprising:
- a processor, wherein the processor is enabled to:
- generate a measurement model for a measurement area of a sample, said measurement model comprising measurement image information, reference measurement information representative of measurements to be made using the measurement model and edge information,
- locate the measurement area of the sample by (i) locating a vicinity area that includes the measurement area of the sample by detecting a target and then displacing a scanning beam of a scanner from the target by a predefined displacement amount, and (ii) locating the measurement area of the sample within the vicinity area by applying image processing utilizing the measurement image information of the measurement model,
- locate edges of structural features within the measurement area of the sample by searching in a proximity of reference edges defined in the edge information,
- perform at least one measurement of the measurement area of the sample based on the located edges of the structural features and the reference measurement information included in the measurement model,
- control the scanner, and
- process multiple detection signals received from a detector;
- the scanner, in communication with the processor, wherein the scanner is enabled to scan the measurement area of the sample with the scanning beam;
- and
- the detector, in communication with the processor, wherein the detector is positioned to receive charged particles resulting from an interaction between the measurement area of the sample and the scanning beam and is enabled to provide the multiple detection signals, based on the received charged particles, to the processor.
7 more elements
Dependencies are inferred from the claim text.