Review method and review device

A review method for detecting a defect on an object under observation, the method comprising steps of:

• performing focal adjustment confirmed by scanning electron microscope (SEM) image for a plurality of coordinate positions pre-registered for the object under observation to determine an actual in-focus position at each of the plurality of coordinate positions;
• creating a focal correction curved surface for focal adjustment based on the actual in-focus position at each of the plurality of coordinate positions;
• setting a focal probe range for the object based on a maximum value of deviation between the focal correction curved surface and actual in-focus position;
• and
• determining an automatic focal adjustment range for defect detection on the object under observation based on the set focal probe range.