Method for correcting a control of an optical scanner and the optical scanner
AssigneeCarl Zeiss MicroImaging GmbH
InventorsJoerg Steinert, Joerg Engel
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AssigneeCarl Zeiss MicroImaging GmbH
InventorsJoerg Steinert, Joerg Engel
Estimating the term…
In a method for correcting a control of an optical scanner (14) which has a beam deflecting element (31) for deflecting a beam of optical radiation and a drive unit (30, 30′) for moving the beam deflecting element (31), said drive unit deflecting a beam of optical radiation directed at the beam deflecting element (31) according to a predetermined target movement using at least one parameter and/or a transfer function, preferably optical, said parameter or transfer function being used to control or regulate the system. In a determination step at least one current value of a drive unit transfer function that reproduces the response of the drive unit (30, 30′) to a predetermined target movement or a change in a target movement is ascertained for at least one frequency, and in a correction step at least one parameter and/or the transfer function is corrected as a function of the current value of the drive unit transfer function.
Method for correcting a control of an optical scanner (14), having a beam deflecting element (31) for deflection of a beam of optical radiation and a drive unit (30, 30′, 35) for moving the beam deflecting element (31), comprising the steps of:
Optical scanner for carrying out the method according to claim 1, comprising:
Dependencies are inferred from the claim text.