Integrated electrooptic system
AssigneeSTMicroelectronics S.r.l.
InventorsPierre Caubet, Michael Gros-Jean
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Abstract
An integrated circuit includes at least one photosensitive element capable of delivering an electrical signal when light of at least one wavelength of the visible spectrum reaches it, and an electrooptic system functioning as an electrochemical shutter. The electrooptic system is located in the path of at least one light ray capable of reaching the photosensitive element and possesses at least one optical property, dependent on electrochemical reaction, that can be modified by an electrical control signal. The optical property is preferably transmission.
Claims16
A process for fabricating an integrated circuit comprising:
- forming a photosensitive element delivering an electrical signal when light of at least one wavelength of the visible spectrum reaches the photosensitive element, wherein the photosensitive element comprises a photodiode comprising amorphous or polymorphic hydrated silicon;
- and
- forming an electrooptic system over the photosensitive element by depositing at least one material, wherein the material has at least one optical property of which varies during an electrochemical reaction, the electrooptic system having a first mode of operation allowing a high transmission between said electrooptic system and said photosensitive element.
A process for fabricating an integrated circuit comprising:
- forming a plurality of first layers which comprise a photosensitive element, wherein one of first layers of the photosensitive element that is formed comprises a layer of amorphous or polymorphic hydrated silicon;
- and
- forming a plurality of second layers which comprise an electrochemical shutter, the plurality of second layers overlying the plurality of first layers, wherein one of the second layers of the electrochemical shutter that is formed comprises a deposited layer of porous tantalum oxide hydrated by immersion in aqueous solution so as to form an electrolyte layer;
- wherein the electrochemical shutter possesses a first transmission mode that is substantially transparent and further possesses a second transmission mode which blocks certain wavelengths of light from reaching the photosensitive element.
Dependencies are inferred from the claim text.