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AssigneeSony Corporation
InventorsKazuhito Shimoda, Ryo Koshiishi, Satoshi Tomioka, Hideo Kawabe
Estimating the term…
A laser processing apparatus includes a support table, a local exhaust device, and a laser light source unit. The support table supports a processing object. The local exhaust device directs laser light into a local exhaust unit in which pressure is locally adjusted over the support table. The laser light source unit outputs the laser light. The local exhaust device is capable of relatively being lifted from the support table by injecting a lift gas to the support table. The processing object includes a multilayer film formed of two or more layers with different materials. An input unit into which reflectance of the processing object is inputted is connected to the laser light source unit.
A laser processing apparatus comprising:
A laser processing method for irradiating a processing object with laser light, comprising the steps of:
A method of manufacturing a wiring substrate by laser processing, comprising the steps of:
A method of manufacturing a display apparatus including a wiring substrate, comprising the steps of:
A wiring substrate manufactured by lifting a local exhaust device from a multilayer film that includes two or more layers with materials different from each other by means of a compressed gas supply unit in the local exhaust device that injects a compressed gas between the multilayer film and the local exhaust device;
Dependencies are inferred from the claim text.