Systems and methods for preparing epitaxially textured polycrystalline films
AssigneeThe Trustees of Columbia University in the City of New York
InventorJames S. Im
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Abstract
The disclosed subject matter relates to systems and methods for preparing epitaxially textured polycrystalline films. In one or more embodiments, the method for making a textured thin film includes providing a precursor film on a substrate, the film includes crystal grains having a surface texture and a non-uniform degree of texture throughout the thickness of the film, wherein at least a portion of the this substrate is transparent to laser irradiation; and irradiating the textured precursor film through the substrate using a pulsed laser crystallization technique at least partially melt the film wherein the irradiated film crystallizes upon cooling to form crystal grains having a uniform degree of texture.
Claims12
A method for making a textured thin film comprising:
- providing a precursor film on a substrate, the film comprising crystal grains having a surface texture and a non-uniform degree of texture throughout the thickness of the film, wherein at least a portion of the this substrate is substantially transparent to laser irradiation;
- and
- irradiating the textured precursor film through the substrate using a pulsed laser crystallization technique to at least partially melt the film wherein the irradiated film crystallizes upon cooling to form crystal grains having a uniform degree of texture throughout the thickness of the film.
Dependencies are inferred from the claim text.