Water quality evaluation method and substrate contacting apparatus used
AssigneeKurita Water Industries Ltd.
InventorsTakeo Fukui, Ikunori Yokoi, Tetsuo Mizuniwa
Life of this patent
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Abstract
A water quality evaluation method capable of evaluating quality of water to be evaluated with high precision and a substrate contacting apparatus used in the water quality evaluation method are provided. The substrate contacting apparatus 10 has a sealing performance keeping the interior at a vacuum degree lower than or equal to −0.094 MPa. A substrate W is accommodated in the substrate contacting apparatus 10 and water to be evaluated is fed therein, after stopping feeding water, the interior of the substrate contacting apparatus 10 is sealed, and the substrate contacting apparatus 10 is sent to an analysis device with the substrate W accommodated therein.
Claims6
A water quality evaluation method, comprising:
- providing a substrate contacting apparatus;
- performing a sealing performance evaluation of the substrate contacting apparatus by connecting the substrate contacting apparatus to a vacuum pump, creating a pressure drop in the substrate contacting apparatus with the vacuum pump, measuring an interior pressure of the substrate contacting apparatus when the pressure drop in the substrate contacting apparatus substantially stops, and calculating a difference between the interior pressure of the substrate contacting apparatus and atmospheric pressure;
- accommodating the substrate in the substrate contacting apparatus when the calculated pressure difference is lower than or equal to −0.094 MPa;
- feeding water to be evaluated into the substrate contacting apparatus to contact the substrate;
- sealing the substrate in the substrate contacting apparatus;
- transporting the substrate contacting apparatus with the substrate accommodated therein to an analysis device;
- taking the substrate out of the substrate contacting apparatus;
- and
- determining a substrate surface state to evaluate water quality.
Dependencies are inferred from the claim text.