Light-sensitive component for use in photoresists
AssigneeAZ Electronic Materials USA Corp.
InventorsWolfgang Zahn, Ralf Grottenmüller, Dieter Wagner
Life of this patent
Estimating the term…
Abstract
A compound of the formula (I) where the symbols and indices are each defined as follows: A is A′, R or O—R; where R is a straight-chain, branched or cyclic, saturated or unsaturated aliphatic radical having 1-8 carbon atoms; A′ is the same or different and is B is a bond, —O—C(O)—, —C(O)—O—, —O—C(O)—, —C(O)—NH—, —NH—C(O)—, —C(O)—O—CH2—CH(OH)—CH2—O, —O—CH2—CH(OH)—CH2—O—(O)C—, —O—C(O)—O—, —O—C(O)—NH— or —NH—C(O)—O—; R1 is H or OH; m is 1, 2, 3, 4 or 5; Y is n is a positive rational number ≧3; E is the same or different and is —CH—CHR2—, —CHR2—CH2—, —CH2—CHR2—O—, —O—CHR2—CH2—, —(CH2)r—O— or —O—(CH2)—; R2 is H or CH3 and r is 1 or 4, is suitable as a light-sensitive component for photoresists.
Claims10
A compound of the formula (I)
- where the symbols and indices are each defined as follows:
- A is A′, R or OR, where R is a straight-chain or branched (C1-C8)-alkyl group or (C3-C3)-cycloalkyl;
- A′ is the same or different and is
- B is a bond, —O—, —C(O)—O, —O—C(O)—, —C(O)—O—CH2—CH(OH)—CH2—O— or —CH2—CH(OH)—CH2—O—C(O)—;
- R1 is H or OH;
- m is 2, 3 or 4;
- Y is
- n is a positive rational number ≧3 and ≦80;
- E is —CH2—CHR2—O—, —O—CHR2—CH2— or —(CH2)r—O—, —O—(CH2)r—;
- R2 is H or CH3;
- and
- r is 1 or 4.
Dependencies are inferred from the claim text.